| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized collimator which has no wavelength dependence and whose wavelength resolution is high. SOLUTION: A metal plate 1 (whose thickness is 40μm) with a hole 4 whose width is 2200μm at the center, and a metal plate 2 (whose thickness is 10μm) without a hole are superimposed alternately to compose this. (The metal plate 1 with the hole 4 is a condition before cutting, as is stated thereafter, so the metal plate 1 at the upper part of the diagram and the metal plate at the lower part of the diagram are not connected in the finished part). Both sides are braced by a presser plate 3 made of metal whose thickness is 2 mm. Each of these metal plates and the presser plate are bonded by the diffusion bonding of thermo-compression bonding. With these, the part of the hole 4 (40μm×2,000μm), which penetrates in the vertical direction, becomes the part to permeate light, the metal plate 2 becomes the partition between the next hole 4, and as a result, the light collimated as the width of 40μm passes it. |
