发明名称 |
SELF-ALIGNED HYBRID DEPOSITION |
摘要 |
<p>A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask (220) by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer havine a second area of coverage that is different from the first area of coverage.</p> |
申请公布号 |
WO03034471(A1) |
申请公布日期 |
2003.04.24 |
申请号 |
WO2002US28089 |
申请日期 |
2002.09.04 |
申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY |
发明人 |
SHTEIN, MAX;FORREST, STEPHEN, R. |
分类号 |
C23C14/04;C23C14/12;H01L51/00;H01L51/40;H01L51/56;(IPC1-7):H01L21/00;H01L21/20 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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