发明名称 SELF-ALIGNED HYBRID DEPOSITION
摘要 <p>A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask (220) by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer havine a second area of coverage that is different from the first area of coverage.</p>
申请公布号 WO03034471(A1) 申请公布日期 2003.04.24
申请号 WO2002US28089 申请日期 2002.09.04
申请人 THE TRUSTEES OF PRINCETON UNIVERSITY 发明人 SHTEIN, MAX;FORREST, STEPHEN, R.
分类号 C23C14/04;C23C14/12;H01L51/00;H01L51/40;H01L51/56;(IPC1-7):H01L21/00;H01L21/20 主分类号 C23C14/04
代理机构 代理人
主权项
地址