发明名称 |
Production of a semiconductor wafer comprises removing the wafer from a single crystal which is rotated about its longitudinal axis using the cutting wires of two saw guides |
摘要 |
Production of a semiconductor wafer comprises removing the wafer from a single crystal which is rotated about its longitudinal axis using the cutting wires of two saw guides. Preferred Features: One saw guide is not moved and one saw guide is rotated until the cutting wires are aligned parallel to the cutting wires of the non-moving guide. The parallel rotational symmetrically curved sides of the wafer are produced by lapping or grinding.
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申请公布号 |
DE10147634(A1) |
申请公布日期 |
2003.04.24 |
申请号 |
DE20011047634 |
申请日期 |
2001.09.27 |
申请人 |
WACKER SILTRONIC AG |
发明人 |
EGGLHUBER, KARL |
分类号 |
B23D57/00;B28D5/04;H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
B23D57/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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