发明名称 Production of a semiconductor wafer comprises removing the wafer from a single crystal which is rotated about its longitudinal axis using the cutting wires of two saw guides
摘要 Production of a semiconductor wafer comprises removing the wafer from a single crystal which is rotated about its longitudinal axis using the cutting wires of two saw guides. Preferred Features: One saw guide is not moved and one saw guide is rotated until the cutting wires are aligned parallel to the cutting wires of the non-moving guide. The parallel rotational symmetrically curved sides of the wafer are produced by lapping or grinding.
申请公布号 DE10147634(A1) 申请公布日期 2003.04.24
申请号 DE20011047634 申请日期 2001.09.27
申请人 WACKER SILTRONIC AG 发明人 EGGLHUBER, KARL
分类号 B23D57/00;B28D5/04;H01L21/304;(IPC1-7):H01L21/304 主分类号 B23D57/00
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