| 摘要 |
PROBLEM TO BE SOLVED: To impart quick disturbance restoring ability and to facilitate regulation, while forming a temperature regulation system as non-interactive one, although there is a constraint condition that dynamics in the plural temperature regulation systems are equal in application of a non-interactive temperature regulation controller paying attention to an average temperature and a gradient temperature as controller constitution for the temperature regulation systems operated in parallel, and dynamics in plural temperature regulation systems are greatly different each other in an exposure device. SOLUTION: A minor loop system is constituted based on outputs of plurality of the first temperature measuring means 36A, 36B for measuring a temperature of a control object, reheating heaters 30A, 30B for making a temperature of a medium variable, a plurality of the second temperature measuring means 33A, 33B for detecting temperature change thereby so as to correct the dynamics, the outputs of the first temperature measuring means 36A, 36B are guided thereafter to a mode temperature calculating means 26 to be compensated respectively, then compensated signals are input to a distribution means 29, and outputs thereof are input to the minor loop system. |
