THIN FILM STRUCTURAL MEMBER, METHOD OF MANUFACTURING THE MEMBER, AND SWITCHING ELEMENT USING THE MEMBER

摘要

A switching element, comprising electrical contacts (4, 4') disposed on a substrate (1) and a movable part (3a) having electrical contacts (5, 5') disposed thereon, wherein the movable part (3a) is fixed to support parts (3b, 3b') through spring parts (3c, 3c') formed of a thin structural member having one or more flat surfaces and the other one or more flat surfaces continued with the flat surfaces at an angle of, for example, approximately 90°.