| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus that can secure sufficient safety, even if a throw-control means has generated a throw initialization signal abnormally. SOLUTION: A treatment tank includes an inner tank and an outer tank, provided to collect treatment liquid overflowing from the inner tank, at least one of first and second tank detection signals S2 and S3 which are sent from first and second detection sensors becomes active, when at least one of the inner and outer tanks is not empty. Then, a determination means will not be initialized, since an AND circuit 31 does not output a throw regulation initialization signal S5 to a throw permission timer 24 and the determination means of flowmeter 40, even if a throw-control section outputs a throw initialization signal S1 by abnormal operation. Then, an interlock mechanism, for preventing dangerous treatment liquid from overflowing from the treatment tank or the like, is actuated effectively, thus fully securing safety.
|
