| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle beam device and an adjusting method of the particle beam equipment, which enable to perform adjustment of a light axis easily, even if the state of the particle beam changes. SOLUTION: It has an operation means to calculate deflection amount of an alignment deflector which performs axial adjustment to an object lens and the like, memorizes two or more calculating methods for calculating the above deflection amount for this operation means, and has a selection means to choose the calculating method concerned.
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