发明名称 SUPPRESSION OF N-TYPE AUTODOPING IN LOW-TEMPERATURE SI AND SIGE EPITAXY
摘要 A method of manufacturing a semiconductor device, which method comprises the step of epitaxially growing a stack comprising an n-type doped layer of a semiconductor material followed by at least one further layer of a semiconductor material, the stack being grown in one continuous growth cycle.
申请公布号 KR20030007758(A) 申请公布日期 2003.01.23
申请号 KR20027016218 申请日期 2002.11.29
申请人 发明人
分类号 H01L21/208;H01L21/331;C30B25/02;C30B29/10;H01L21/205;H01L21/22;H01L29/737 主分类号 H01L21/208
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