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发明名称
Verfahren zur Kontaktlochherstellung
摘要
申请公布号
DE59609964(D1)
申请公布日期
2003.01.23
申请号
DE19965009964
申请日期
1996.08.29
申请人
INFINEON TECHNOLOGIES AG
发明人
KERBER, DR.RER.NAT.
分类号
H01L21/28;H01L21/336;H01L21/762;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
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地址
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