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发明名称
STRIPPING, PASSIVATION AND CORROSION INHIBITION OF SEMICONDUCTOR SUBSTRATES
摘要
申请公布号
EP0692141(B1)
申请公布日期
2002.12.04
申请号
EP19950908705
申请日期
1995.01.27
申请人
APPLIED MATERIALS, INC.
发明人
CHEN, JIAN;HSIEH, PETER;ISH-SHALOM, CARMEL;LAU, WESLEY;PAPANU, JAMES, S.;MAK, STEVE, S., Y.;RHOADES, CHARLES, STEVEN;SHIEH, BRIAN;LATCHFORD, SCOTT, IAN;WILLIAMS, KAREN, A.;YU-WANG, VICTORIA
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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