| 摘要 |
PROBLEM TO BE SOLVED: To provide a stocker improved so as to enable a clean room function to be performed even by any stock unit by thoroughly introducing blowing-down clean air to the stock units of upper and lower stages. SOLUTION: The stocker comprises stock shelf 2 in which a plurality of stages of the stock units 2a each for placing a cassette 3 for a wafer are laminated, and a back side wall 10 disposed on a back surface side to the shelf 2 to introduce clean air to be ejected from a ceiling wall 9 downward to a space 21 between the shelf 2 and the back side wall 10 via an air supply port 12. The stocker further comprises a regulating means 22 formed on a back surface of the shelf 2 with a flow hole 20 to input the wind into the stock unit 2 to regulate an amount of a wind flowing down in the space 21 from the port 12. |
