OPTICAL DEFLECTOR AND LASER BEAM MACHINING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a high-quality optical deflector used in a laser beam machining device, surely preventing the vibration in a direction perpendicular to the surface of a reflection mirror. SOLUTION: The optical deflector is provided with the reflection mirror 2 reflecting an incident laser beam, a galvanometer 1 freely rotatably supporting one end of the reflection mirror 2 and rotationally driving the reflection mirror corresponding to inputted position control signals and a rotation supporting mechanism (bearing 5) freely rotatably supporting the other end of the reflection mirror 2.