发明名称 |
PROXIMITY FIELD LIGHT PROBE, PROXIMITY FIELD LIGHT OPTICAL MICROSCOPE HAVING PROXIMITY FIELD LIGHT PROBE, PROXIMITY FIELD LIGHT LITHOGRAPHY DEVICE AND PROXIMITY FIELD LIGHT STORAGE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a proximity field light prove capable of obtaining a proximity field light with sufficient intensity even when an opening size is made small for raising a resolution power, a proximity field light optical microscope having the proximity field light probe, a proximity field light lithography device, and a proximity field light storage device. SOLUTION: The proximity field light probe has a constitution that the opening having a slit-shaped incision in the circumference is disposed on a light shield film. The light from a light source polarized in a predetermined direction is made incident onto the slit-shaped incision of the opening from one side of the light shield film, and the proximity field light is generated at the opening part. |
申请公布号 |
JP2002296169(A) |
申请公布日期 |
2002.10.09 |
申请号 |
JP20010098322 |
申请日期 |
2001.03.30 |
申请人 |
CANON INC |
发明人 |
KURODA AKIRA;INAO YASUHISA;YAMAGUCHI TAKAKO;YAMADA TOMOHIRO |
分类号 |
G01Q60/18;G01Q60/22;G01Q80/00;G02B6/26;G11B7/135;G11B11/105;G11B13/08 |
主分类号 |
G01Q60/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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