发明名称 PROXIMITY FIELD LIGHT PROBE, PROXIMITY FIELD LIGHT OPTICAL MICROSCOPE HAVING PROXIMITY FIELD LIGHT PROBE, PROXIMITY FIELD LIGHT LITHOGRAPHY DEVICE AND PROXIMITY FIELD LIGHT STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a proximity field light prove capable of obtaining a proximity field light with sufficient intensity even when an opening size is made small for raising a resolution power, a proximity field light optical microscope having the proximity field light probe, a proximity field light lithography device, and a proximity field light storage device. SOLUTION: The proximity field light probe has a constitution that the opening having a slit-shaped incision in the circumference is disposed on a light shield film. The light from a light source polarized in a predetermined direction is made incident onto the slit-shaped incision of the opening from one side of the light shield film, and the proximity field light is generated at the opening part.
申请公布号 JP2002296169(A) 申请公布日期 2002.10.09
申请号 JP20010098322 申请日期 2001.03.30
申请人 CANON INC 发明人 KURODA AKIRA;INAO YASUHISA;YAMAGUCHI TAKAKO;YAMADA TOMOHIRO
分类号 G01Q60/18;G01Q60/22;G01Q80/00;G02B6/26;G11B7/135;G11B11/105;G11B13/08 主分类号 G01Q60/18
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