METHOD FOR MANUFACTURING ARRAY BOARD FOR DISPLAY

摘要

PROBLEM TO BE SOLVED: To reduce the number of manufacturing processes to reduce a manufacturing cost and improve manufacturing efficiency in a process of manufacturing a planar display array board having contact holes 51, 16 piercing a resin layer insulation film 5 at identical points and a gate insulation film 15. SOLUTION: A manufacturing method is constituted by forming a gate insulation film 15 from a silicon nitride film only, forming a pattern of a resin layer insulation film 5 by an exposure and development operation and forming contact holes 16 piercing the gate insulation film 15 with use of the pattern of the resin layer insulation film 5 as a mask by inductively coupled plasma etching at low pressure (of 0.13-1.5 Pa (1-10 mTorr)) enough to avoid the side etching of the gate insulation film 15, using etching gas not containing oxygen (SF6 /N2 / He) so that the corrosion of a metal layer surface at each of other contact holes 52, 53 piercing the resin layer insulation film 5 is suppressed to a minimum.