发明名称 NON-RECTIFYING CONTACT FOR SEMICONDUCTOR DEVICES AND FORMATION OF SAME
摘要 1277962 Semi-conductor devices GENERAL ELECTRIC CO 20 June 1969 [23 July 1968] 31376/69 Heading H1K A semi-conductor body 30 is provided with a composite non-rectifying electrode 20 by depositing in sequence a layer 7A of Sb, a layer 7B of Au, a layer 8A of P and a layer 8B of Au, and then heating the structure, e.g. for 5 minutes at 250-350‹C. followed by 5-30 minutes at 300-650‹ C. in nitrogen, to cause interdiffusion of the metals to occur between the layers. A fifth layer 9 of Au may also be applied. The layers 7A, 7B may be formed by evaporation from a common Au-Sb source and the layers 8A, 8B may similarly derive from a common Au-P source. The device illustrated in an npn Si planar transistor, having an emitter electrode 2 either of Al or made similarly to the electrode 20. If the composite inter-diffused electrode is applied to p-type material the latter should be sufficiently highly doped not to be converted to n-type material by the electrode constituents.
申请公布号 GB1277962(A) 申请公布日期 1972.06.14
申请号 GB19690031376 申请日期 1969.06.20
申请人 GENERAL ELECTRIC COMPANY 发明人 RONALD ALTON STOTT
分类号 H01L21/00;H01L21/24 主分类号 H01L21/00
代理机构 代理人
主权项
地址