| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer robot shortening the reading time of an ID (alphanumeric characters and bar codes) for every wafer and reducing the installation space for a reader. SOLUTION: (a) The reader reading the wafer ID such as the alphanumeric characters and the bar codes is mounted on an arm part 5 of a robot body. (b) As for a method for mounting the wafer on the robot, support materials 3 and 3' are attached to a robot finger 4 and the wafer is retained (edge grip) from the bottom by the support materials. (c) When the robot scoops up the wafer while transferring, a rotating mechanism 6 on the finger 4 is rotated to rotate the wafer so that the ID reader can read the ID engraved in the end face of the wafer. (d) The transferring action and the reading are simultaneously performed so as to shorten the processing time. |
