WAFER TRANSFERRING APPARATUS WITH CHUCK

摘要

PURPOSE: A wafer transferring apparatus with a chuck is provided to prevent a wafer from being contaminated by hard particles, by using a wafer holder composed of a material having a high friction coefficient and good elasticity while a vacuum chuck is not used. CONSTITUTION: A wafer is placed on a plate(100a). A plurality of wafer holders(A) are made of a material having a high friction coefficient and good elasticity, attached to an edge region of the plate. The wafer holder is made of one selected from a group of Chemraz, Kalrez and fluorine rubber. The chuck has a valve and a pipe. The pipe connects a hole penetrating the upper and lower portions of the wafer holder formed in the center of the wafer holder with the valve.