发明名称 Systems and methods for forming processing streams
摘要 Systems and methods for processing electronic components having a vessel for holding electronic components and a carrier supply system operatively associated with the vessel for supplying a carrier stream to the vessel. An injection system is in fluid communication with the carrier supply system for introducing a process solution into the carrier supply system and a processor is operatively associated with the injection system. The processor generates data for process solution volume and injection pressure associated with the injection system and carrier stream flow rate associated with the carrier supply system as a function of time. A process solution injection rate as a function of process solution volume, injection pressure, and carrier stream flow rate is determined. Values for the injection pressure and the carrier stream flow rate for a predetermined process solution injection rate are the determined. The processor then controls injection of the process solution from the injection system into the carrier supply system at the predetermined process solution injection rate by adjusting the injection pressure and the carrier stream flow rate to the determined values.
申请公布号 US2002104552(A1) 申请公布日期 2002.08.08
申请号 US20010930009 申请日期 2001.08.15
申请人 BAY STEVEN;KAISER ROGER 发明人 BAY STEVEN;KAISER ROGER
分类号 H01L21/00;(IPC1-7):B08B3/00 主分类号 H01L21/00
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