PROCESS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER,申请号EP20000948892-传众专利搜索

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发明名称	PROCESS FOR TREATING A WORKPIECE SUCH AS A SEMICONDUCTOR WAFER
摘要
申请公布号	EP1212151(A1)	申请公布日期	2002.06.12
申请号	EP20000948892	申请日期	2000.07.21
申请人	SEMITOOL, INC.	发明人	BERGMAN, ERIC, J.
分类号	H01L21/311;B08B3/00;B08B3/02;B08B3/04;B08B3/08;B08B7/00;C23G1/00;G03F7/42;H01L21/00;H01L21/02;H01L21/304;H01L21/306;H01L21/67;(IPC1-7):B08B3/08;C23G1/02	主分类号	H01L21/311
代理机构		代理人
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