Micro-lens built-in vertical cavity surface emitting laser

摘要

A micro-lens built-in vertical cavity surface emitting laser (VCSEL), having a VCSEL portion (100) for emitting a laser beam in a direction in which semiconductor material layers are stacked; a micro-lens (190) formed of a material capable of transmitting the laser beam emitted from the VCSEL portion; and an adjusting portion (170) located between the VCSEL portion (100) and the micro-lens (190) for adjusting a distance (d) between the micro-lens and the VCSEL portion. When constructing an optical system with the VCSEL including the VCSEL portion, the adjusting portion, and the micro-lens, there is no need for a separate condensing lens and focusing position adjusting element. In addition, optical alignment structure is simple with increased freedom in arranging elements, and the number of parts required is sharply reduced.