发明名称 |
Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects |
摘要 |
Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the photographed probes and first virtual images of the electrode pads are displayed in second and first image data areas on a monitor screen. Dark and light colors in terms of brightness are applied to pixels of the second virtual image and the first virtual image. The second virtual images are moved on the monitor screen, so that the second virtual images are superimposed on the first virtual images. The total sum of the brightness (luminance) of all the first virtual images is calculated. On the basis of the calculated luminance value, a position where the target probes are most successfully brought into contact with the target pads is detected.
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申请公布号 |
US2002054209(A1) |
申请公布日期 |
2002.05.09 |
申请号 |
US20010986287 |
申请日期 |
2001.11.08 |
申请人 |
OBI HIROKI |
发明人 |
OBI HIROKI |
分类号 |
G01R1/073;G01R31/28;G03F9/00;G06T1/00;H01L21/66;H04N7/18;(IPC1-7):H04N7/18;H04N9/47 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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