发明名称 |
Wafer handling system and associated method |
摘要 |
<p>A system for processing semiconductor wafers includes adaptations allowing the selective handling of cassettes for both 200-mm wafers and 300.mm wafers. The system is configured initially for handling standard 300.mm FOUP cassettes. Adaptions for handling 200.mm wafer open cassettes include a load port adapter frame for receiving such cassettes on a input/output platform; a cassette handler adapter configured for reversibly mounting on a cassette handler end effector and for receiving 200-mm open cassettes; a store adapter frame for converting 300.mm FOUP storage compartments into compartments for storing 200-mm open cassettes; and a Transhipment FOUP for holding 200-mm open cassettes upon a cassette transfer platform and bringing such cassettes into an interface with a wafer handler. The Transhipment FOUP has outer surfaces resembling a standard 300-mm FOUP cassette, but is configured to receive a 200-mm open cassette therein. <IMAGE></p> |
申请公布号 |
EP1197990(A2) |
申请公布日期 |
2002.04.17 |
申请号 |
EP20010306928 |
申请日期 |
2001.08.14 |
申请人 |
ASM INTERNATIONAL N.V. |
发明人 |
ZINGER, JAN;DE RIDDER, CHRISTIANUS G.M. |
分类号 |
H01L21/673;H01L21/677;H01L21/68;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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