发明名称 |
Method and apparatus for forming an interlayer insulating film, and semiconductor device |
摘要 |
Disclosed is a method for forming an interlayer insulating film which comprises the steps of forming an underlying insulating film on a substrate; forming a porous SiO2 film on the underlying insulating film by chemical vapor deposition method using Si2H6 and an oxidative gas as a reaction gas; subjecting the porous SiO2 film to H (hydrogen) plasma treatment; forming a plasma SiO2 film and a fluidic SiO2 film formed by TEOS+O3 on the porous SiO2 film; then smoothing a surface of the SiO2 film by etching; and forming a cover insulating film on the smoothed surface.
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申请公布号 |
US6372670(B1) |
申请公布日期 |
2002.04.16 |
申请号 |
US20000477352 |
申请日期 |
2000.01.04 |
申请人 |
CANON SALES CO., INC.;SEMICONDUCTOR PROCESS LABORATORY CO., LTD. |
发明人 |
MAEDA KAZUO |
分类号 |
C23C16/40;C23C16/44;C23C16/515;C23C16/52;H01L21/31;H01L21/314;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/31;H01L21/469 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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地址 |
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