Chemical filter

摘要

A chemical filter includes a unit body and an adsorbent housed in the unit body. The adsorbent is for adsorbing a gas. The chemical filter provides a purified gas in which the concentration of ammonia and the concentration of organic gases having a boiling point of about 150° C. or higher, respectively are about 1 ppb(v) or less. This purified gas is applicable for a semiconductor manufacturing system without causing troubles of tarnish and the like.