| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a once-through fan for an excimer laser device capable of securing control stability of magnetic bearing control. SOLUTION: In this structure, both ends of a rotary shaft 2 are disposed with first and second radial magnetic bearings 101, 103, first and second protection bearings 11, 15 are disposed near the radial magnetic bearings 101, 103, and a third radial magnetic bearing 102 is disposed on a fan side near a motor 104. The third radial magnetic bearing 102 corrects a negative spring element of the motor 104.
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