| 摘要 |
PURPOSE: A probe station is provided to have a chuck which rotates with respect to an auxiliary chuck. CONSTITUTION: A probe station comprises a base(10) which supports a platen(12) through a number of jacks(14a,14b,14c,14d) which selectively raise and lower the platen vertically relative to the base by a small increment. Also supported by the base(10) of the probe station is a motorized positioner(16) having a rectangular plunger which supports a movable chuck assembly for supporting a wafer or other test device. The chuck assembly passes freely through a large aperture in the platen(12) which permits the chuck assembly to be moved independently of the platen by the positioner(16) along X, Y and Z axes, i.e., horizontally along two mutually-perpendicular axes X and Y, and vertically along the Z axis. Likewise, the platen(12), when moved vertically by the jacks, moves independently of the chuck assembly and the positioner(16). |
