Förfarande och apparat för alstring av röntgen- eller EUV-strålning, samt användning därav

摘要

Method consists in forming target jet (5) by forcing pressurized liquid metal, or a liquefied noble gas through an outlet opening via interaction area (9). Electron beams (4) are directed onto the jet in area (9) to generate the radiation. The jet is heated to a plasma-forming temperature so that soft radiation is generated, the jet being in the solid or liquid state in area (9). There is an Independent claim for an apparatus for generating X-ray or extreme UV radiation.