| 摘要 |
PURPOSE: To enable a laser beam having high output power to be emitted stably by preventing optical loss with respect to a fundamental wave from being increased while suppressing the heaping of impurities on optical surfaces of optical parts. CONSTITUTION: A deep ultraviolet laser beam being the higher harmonic generated in the inside of a nonlinear optical element 101 is emitted to the outside of the element 101 in a state in which the deep ultraviolet laser beam is separated spatially from a green laser beam being the fundamental wave. Then, a path in which the fundamental wave is closed is formed by making the green laser beam emitted to the outside of the element 101 to be reflected by an input coupling mirror 102 and by making the laser beam to enter into the inside of the element 101 again and also the deep ultraviolet laser beams emitted to the outside of the element 101 is taken out to the outside of a deep ultraviolet laser beam generating part 20 by making the laser beam to be reflected by a reflecting mirror 28 different from the input coupling mirror 102.
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