INJECTOR SHIELD OF APPARATUS FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: An injector shield of an apparatus for manufacturing a semiconductor is provided to extend an interval of time that an injector is used, by using the injector shield to reduce contamination by powder. CONSTITUTION: A vertical shield(112a) and a bent shield(112b) are formed as one body in a shield mesh(112). Guide holes into which the vertical shield of the shield mesh and the bent shield are inserted, are formed as one body in a shield guide(116). A frame in the lower portion of the shield guide is omitted so that the power is prevented form being deposited in the lower portion of the shield guide corresponding to a connection portion of the vertical shield and the bent shield.