发明名称 SEMICONDUCTOR TESTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To solve the problem in the conventional apparatuses that the testing cost of a semiconductor device is high and it is necessary to ensure preserving space of a testing fixture. SOLUTION: A connection part 24, having a plurality of pads, is provided to a test board 21. A plurality of anisotropic conductive sheets 251, 252, 253, a power supply sheet 26 and a grounding sheet 27 are arranged alternately on the connection part 24. The connection part 24 and the semiconductor device 23 are connected via the anisotropic conductive sheets 251, 252, 253, the power supply sheet 26 and the grounding sheet 27 and the power supply sheet 26 and the grounding sheet 27 are replaced, corresponding to the pin arrangement of the semiconductor device 23.
申请公布号 JP2001343433(A) 申请公布日期 2001.12.14
申请号 JP20010086273 申请日期 2001.03.23
申请人 TOSHIBA CORP 发明人 TAMARU HIROYUKI;FUJII MITSUO
分类号 G01R31/26;G01R1/067;G01R1/073;G01R31/28;G01R31/319;(IPC1-7):G01R31/28 主分类号 G01R31/26
代理机构 代理人
主权项
地址