| 摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem where laser working quality is not stabilized since a laser light in a propagation optical path is made to diverge by gas or the like which is generated by temperature increase of organic components such as a cover of wiring and a substrate; and a forcal position, a beam spot diameter, etc., in the case of laser work are changed, in a laser oscillator 1 having constitution in which a power source part 9, a resonator part 3 and an optical path part of a laser processing machine are accommodated in the same cabinet 2. SOLUTION: In the cabinet 2, inner spaces of the resonator part 3 and an electric/electronic part 9 are isolated and made independent of each other by using a cabinet isolating plate 13. A tightly closed shutter box 14 is attached to a mechanical shutter 8 of a laser optical path, and an optical axis pipe 15 is attached to the laser optical path (propagation path). An air supply port 16 for eliminating CO2 gas is installed to the optical axis pipe 15, the shutter box 14 and the inside of an upper cabinet of the resonator part 3, and external exhaust fans 17 for inner gas generated in the electric/electronic part 9 are installed on a lower cabinet.</p> |
