| 发明名称 |
ABRASIVE GRAIN DISPERSANT FOR POLISHING, AND SLURRY FOR POLISHING |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain both an abrasive grain dispersant for polishing, having improved polishing rate and surface roughness, and a slurry for polishing. SOLUTION: This slurry for polishing is constituted of an abrasive grain dispersant characterized by comprising a carbonyl group-containing compound having a specific composition, abrasive grain and water.</p> |
| 申请公布号 |
JP2001294848(A) |
申请公布日期 |
2001.10.23 |
| 申请号 |
JP20000115456 |
申请日期 |
2000.04.17 |
| 申请人 |
SANYO CHEM IND LTD |
发明人 |
YAMADA YASUHIRO;YAMAGUCHI TAKESUKE |
| 分类号 |
B24B57/02;B01F17/06;B24B37/00;C09K3/14;H01L21/304;(IPC1-7):C09K3/14 |
主分类号 |
B24B57/02 |
| 代理机构 |
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