发明名称 |
Fabricating a hybrid imaging device having non-destructive sense nodes |
摘要 |
A hybrid detector or imager includes two substrates fabricated under incompatible processes. An array of detectors, such as charged-coupled devices, are formed on the first substrate using a CCD fabrication process, such as a buried channel or peristaltic process. One or more charge-converting amplifiers are formed on a second substrate using a CMOS fabrication process. The two substrates are then bonded together to form a hybrid detector.
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申请公布号 |
US6303923(B1) |
申请公布日期 |
2001.10.16 |
申请号 |
US19990437328 |
申请日期 |
1999.11.09 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
WADSWORTH MARK;ATLAS GENE |
分类号 |
H01J40/14;H01L;H01L27/00;H01L27/146;(IPC1-7):H01J40/14 |
主分类号 |
H01J40/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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