发明名称 |
Method of improving moisture resistance of low dielectric constant films |
摘要 |
A method and apparatus for depositing a low dielectric constant film includes depositing a silicon oxide based film, preferably by reaction of an organosilicon compound and an oxidizing gas at a low RF power level from about 10W to about 500W, exposing the silicon oxide based film to water or a hydrophobic-imparting surfactant such as hexamethyldisilazane, and curing the silicon oxide based film at an elevated temperature. Dissociation of the oxidizing gas can be increased in a separate microwave chamber to assist in controlling the carbon content of the deposited film. The moisture resistance of the silicon oxide based films is enhanced.
|
申请公布号 |
US2001026849(A1) |
申请公布日期 |
2001.10.04 |
申请号 |
US20010792122 |
申请日期 |
2001.02.21 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
YAU WAI-FAN;CHEUNG DAVID;CHOPRA NASREEN GAZALA;LU YUNG-CHENG;MANDAL ROBERT;MOGHADAM FARHAD |
分类号 |
C23C16/40;C23C16/56;H01L21/312;H01L21/316;H01L21/768;(IPC1-7):C23C16/00;B05D5/12;B05D3/02 |
主分类号 |
C23C16/40 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|