Scanning probe microscope having graphical information

摘要

There is disclosed a scanning probe microscope, such as an atomic force microscope or a friction force microscope, permitting an operator to easily adjust the position on a photodiode hit by light. The microscope includes an optical detector having a light-sensitive portion that is circular or polygonal and consists of a photodiode. The profile of the photodiode or graphical information about the photodiode is stored in memory. The photodiode is segmented into four elements. A calculator finds the center of the light incident on the photodiode from the output signals from the four elements. A picture of the photodiode is displayed on the viewing screen of a display unit according to the graphical information about the photodiode stored in memory. A marker indicating the incident position of the light is superimposed on the picture of the photodiode displayed on the viewing screen.