| 摘要 |
<p>A crystal vibration device comprising a crystal diaphragm formed on the opposite main surfaces thereof with exciting electrodes and extraction electrodes extracted from respective exciting electrodes, and an electrode pad formed on a base and electrically connected with the crystal diaphragm via a silicon-based conductive adhesive. Each of at least extraction electrodes, out of the exciting electrodes and the extraction electrodes, comprises a Cr film layer, an Au film layer, and a Cr thin film layer or an Ag thin film layer sequentially laminated on the crystal diaphragm. The electrode pad comprises a tungsten- or molybdenum-made metallized layer, a Ni film layer and an Au film layer sequentially laminated on the base, and at least a specified region, to which a silicon conductive adhesive is applied, in the Au film layer of the electrode pad is diffused with Ni in the Ni film layer.</p> |
