METHOD FOR PROCESSING ALIGNMENT ERROR OF STEPPER

摘要

PURPOSE: A method for processing an alignment error of a stepper is provided to process efficiently errors generated when performing an alignment process for exposing a wafer. CONSTITUTION: A wafer is loaded on a wafer stage within a stepper(601). A pre-alignment process is performed to fix the wafer to a desired location(603). A search alignment process for the wafer is performed by shifting the wafer stage to an X-axis and a Y-axis(604). A fine alignment process for the wafer is performed by shifting finely the wafer stage to an X-axis and a Y-axis(605). An operation mode of the stepper is changed to a mode for switching a shot when a fine alignment error is detected(611). The error shot is displayed(613). The search alignment process and the fine alignment process are performed repeatedly(615-619).