发明名称 Ultrasonic vibration cutting method and apparatus
摘要 An ultrasonic vibration cutting method comprising mounting and fixing a part to be cut on a mounting table, moving down an ultrasonic vibration rotation unit, stopping the downward movement of the ultrasonic vibration rotation unit when the cutting blade of the ultrasonic vibration rotation unit reaches a position for cutting the part, moving the ultrasonic vibration rotation unit linearly for cutting, and turning and vibrating the cutting blade with ultrasonic waves to cut the part.
申请公布号 US6250188(B1) 申请公布日期 2001.06.26
申请号 US20000489028 申请日期 2000.01.21
申请人 ULTEX CORPORATION 发明人 SATO SHIGERU;ISHII RYOICHI
分类号 B28D5/02;B26D7/08;H01L21/301;H01L21/304;(IPC1-7):B26D1/00 主分类号 B28D5/02
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