发明名称 CERAMIC HEATER AND METHOD FOR PRODUCING THE SAME, AND CONDUCTIVE PASTE FOR HEATING ELEMENT
摘要 It is to provide a ceramic heater being easy in temperature control, thin and light as well as an electrically conductive paste for the formation of a heating body used in the heater, and is characterized in that a heating body formed by sintering metal particles and, if necessary, a metal oxide is arranged on a surface or an inside of a ceramic substrate comprised of a nitride ceramic or carbide ceramic. And also, a paste formed by mixing metal particles and a metal oxide is used as the electrically conductive paste. <IMAGE>
申请公布号 EP1109423(A1) 申请公布日期 2001.06.20
申请号 EP19990923983 申请日期 1999.06.09
申请人 IBIDEN CO., LTD. 发明人 FURUKAWA, MASAKAZU;HIRAMATSU, YASUJI;ITO, YASUTAKA
分类号 H05B3/20;H01L21/00;H01L21/02;H01L21/027;H05B3/10;H05B3/12;H05B3/14;H05B3/16;H05B3/18;H05B3/74;(IPC1-7):H05B3/28 主分类号 H05B3/20
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