发明名称 |
CERAMIC HEATER AND METHOD FOR PRODUCING THE SAME, AND CONDUCTIVE PASTE FOR HEATING ELEMENT |
摘要 |
It is to provide a ceramic heater being easy in temperature control, thin and light as well as an electrically conductive paste for the formation of a heating body used in the heater, and is characterized in that a heating body formed by sintering metal particles and, if necessary, a metal oxide is arranged on a surface or an inside of a ceramic substrate comprised of a nitride ceramic or carbide ceramic. And also, a paste formed by mixing metal particles and a metal oxide is used as the electrically conductive paste. <IMAGE>
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申请公布号 |
EP1109423(A1) |
申请公布日期 |
2001.06.20 |
申请号 |
EP19990923983 |
申请日期 |
1999.06.09 |
申请人 |
IBIDEN CO., LTD. |
发明人 |
FURUKAWA, MASAKAZU;HIRAMATSU, YASUJI;ITO, YASUTAKA |
分类号 |
H05B3/20;H01L21/00;H01L21/02;H01L21/027;H05B3/10;H05B3/12;H05B3/14;H05B3/16;H05B3/18;H05B3/74;(IPC1-7):H05B3/28 |
主分类号 |
H05B3/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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