| 摘要 |
PROBLEM TO BE SOLVED: To obtain a device where active oxygen produced by plasma is introduced efficiently in the region reacting with an object to be measured without scattering of the object to be processed. SOLUTION: Matters to be processed 3 are placed on a processing tray 4 inside a cylindrical processing vessel 2, the inside of the processing vessel 2 is made to be a specific gas atmosphere by depressurization operation through an exhaust piece 8 and introducing gas from the gas introduction hole 5, a plasma 1 is generated by a high frequency induction coil 7 arranged by way of an electric insulation window 11 in the upper part of the processing vessel 2, and matters to be processed 3 are processed with the generated active oxygen, for asking and volume reduction. In the inner wall of the processing vessel 2 positioning at the height between the lower end of the window 11 and the upper end of the processing plate 4, a plurality of gas introducing hole 5 are almost uniformly arranged. |
