METHOD AND DEVICE FOR THE HEAT TREATMENT OF SUBSTRATES,申请号KR1020007012586-传众专利搜索

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发明名称	METHOD AND DEVICE FOR THE HEAT TREATMENT OF SUBSTRATES
摘要
申请公布号	KR20010043499(A)	申请公布日期	2001.05.25
申请号	KR1020007012586	申请日期	2000.11.10
申请人		发明人
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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