APPARATUS FOR DETECTING WAFER OF LOADLOCK CHAMBER FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for detecting a wafer of a loadlock chamber for manufacturing a semiconductor is provided to prevent damage to a wafer and a process defect, by precisely checking whether the wafer is normally placed. CONSTITUTION: A main detecting sensor(62) detects whether a central portion of a wafer(90) is loaded on a chamber lead. The first and second auxiliary detecting sensors(64,66) detect whether an edge portion of the wafer is loaded, connected in parallel to the each other to output an electrical signal operated in connection with the main detecting sensor. A plurality of transparent windows(82,84,86) are installed in a position where the main detecting sensor and the first and second auxiliary detecting sensors are mounted, so that the transparent windows can be inspected by naked eyes.