APPARATUS FOR FABRICATING INTERNAL ELECTRODE ELECTROSTATIC COUPLING TYPE POLYMER LAYER

摘要

PURPOSE: An apparatus for fabricating an internal electrode electrostatic coupling type polymer layer is provided to maintain proper characteristics of an organic polymer layer by minimizing a discharge energy and forming uniformly the organic polymer layer. CONSTITUTION: A discharge tube(21) has a discharge space of a shape of vertical furnace. A reactor(22) is connected with a lower portion of the discharge tube(21). The reactor(22) has a predetermined reaction space. A discharge electrode(23) is installed in an upper end portion and a lower end portion of the discharge tube(21). The discharge electrode(23) is exposed by an internal carrier gas. A discharge electrode(23) is used for discharging particles of the carrier gas of the discharge tube(21). A discharge power supply portion(24) is used for supplying electric power to the discharge electrode(23).