| 摘要 |
<p>Carrying control and information management in accordance with individual groups are executed without human operators. A host computer receives a load request from a process equipment and is triggered by the request to dispatch a product lot comprising a non product wafer stored on a storage shelf to the equipment which made the request, and to send a command to carry the lot to an AMHS. Some processing equipment execute processing while holding a dummy wafer, and some equipment require a wafer for insitu cleaning at specified frequency. By setting an application group as information in the load request from the processing equipment, the non product wafer required by the processing equipment can be carried at the required timing. Moreover, a non product wafer which was processed for the purpose of guaranteeing the product can be determined from its flow and application group, enabling processing information of the non product wafer to be linked to the history of the product lot.</p> |
