| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermocompression bonding apparatus for a sheet-shaped material, capable of reducing the time required for heating and evenly heating the sheet-shaped material. SOLUTION: This thermocompression bonding apparatus which bonds a sheet-shaped material while heating it using induction heating method includes a pair of insulating pressure boards 12, 12 having opposite bonding surfaces to bond the sheet-shaped material, grid electrodes 16, 26 arranged behind the pressure boards in an approximately parallel relationship with the sheet-shaped material, a high frequency power supply 34 applying a high frequency current between the grid electrodes, and drive means 15, 25 for driving both grid electrodes 16, 26 approximately parallel to the sheet-shaped material.
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