| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for mounting a sample capable of surely fixing the sample on the apparatus, easily changing the sample, preventing loads from applying to a terminal of the apparatus, eliminating dispersion of mounting and fixing positions of an identical sample and operating the sample in any type of packages. SOLUTION: This apparatus has a socket 3 for detachably holding a sample 7 and means 2, 4, 14 and 15 for detachably fixing the socket 3 to a sample mounting base 1, and the socket 3 has a means 6 for electrically connecting all terminals 8 of the mounted sample 7 to the mounting base 1, and further has an opening 12 for enabling the radiated part by the ion beam, etc., of the mounted sample 7 to be exposed approximately in the same height as that of the socket 3. Thereby, the sample 7 is surely fixed on the sample mounting base 1 and changing the sample 7 can easily be conducted. Correction, machining and observation can easily be operated by an FIB(forcus ion beam) or the like.
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