Processes using photosensitive materials including a nitro benzyl ester photoacid generator

摘要

Photoacid generators advantageous for use in applications such as photoacid generators used in chemically amplified resists are disclosed. These compounds are based on an ortho nitro benzyl configuration employing an alpha substituent having high bulk, steric characteristics, and electron withdrawing ability. The enhanced efficacy is particularly found in compounds both having a suitable alpha substituent and a second ortho substituent with large electron withdrawing and steric effects.