| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a low cost, reliable, compact and highly sensitive semiconductor acceleration sensor. SOLUTION: This device is provided with a sensing element 1 where a rectangular frame like support pait 16 has a weight part 5 supported swingably through a pair of thin flexible parts 4, two gouge resistors 6 respectively detect deformations of the flexible parts 4 on the individual flexible parts 4, and p+ type diffusion resistor wiring 11 is provided from the individual gauge resistors 6 to a specified position of the support part 16. The weight part 5, flexible parts 4, and the support part 16 are formed integrally by etching an n type silicon substrate 1a. Stopper parts 8 are extruded in a direction orthogonal to (crossing) a line connecting between the support part 16, the flexible part 4 and the weight part 5 at parts on an inner peripheral surface of the support part 16 to make a distance between the inner peripheral surface of the support part 16 and the weight part 5 shorter than the other parts.</p> |
