Capacitive sensor for monitoring the material properties of liquids and gases has electrodes with random surface structures

摘要

Two half cases (20,21) are formed on silicon wafers with a typical size of 2 mm x 5 mm. Each are grooved (22) so that together a channel is formed through which the fluid to be tested can flow. The surfaces are provided with a surface structure (24) consisting of randomly distributed pyramids (25) formed by treating the silicon surface with a dilute solution of KOH. The pyramids have different dimensions and overlap