PARALLEL BRANCHED FLUID FEEDING DEVICE

摘要

PROBLEM TO BE SOLVED: To stably hold the steady flow of another passage and to enable one regulator to control the steady flow of plural passages by setting a mass flow controller so as to have delay time from an operation start point to a command flow value when controlling the circulation of a fluid in a certain passage from a closed state to a circulating state. SOLUTION: On the assumption valves V1 and V2 are opened in a passage S1, gas is ordinarily fed and gas reaction is performed in a reaction chamber C, on this stage, closed valves V3 and V4 are opened and gas flows into a time delay type mass flow controller DMFC2. The valve part of the time delay type mass flow controller DMFC2 is completely closed at the beginning but when a valve detecting part detects the changes of the valves V3 and V4 from closing to opening, after short standstill time, a time delay part starts operating. This short standstill time is provided as time for setting the disturbance of gas stream caused by opening the valves V3 and V4.